Vella, P.,
Dimov, S.,
Minev, R., &
Brousseau, E.
().
Technology maturity assessment of micro and nano manufacturing processes and process chains. // <I>Proc.<D> of the Institution of mechanical engineers, P. B : J. of Engineering manufacture, 232, 2017, № 8, p. 1362-1383, DOI: 10.1177/0954405416668922..